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中文
Effect of high-frequency and low-frequency power of ICP/CCP C4F8/Ar plasma on the textured structure of AZO films
WU Ming-zhi;JIN Cheng-gang;WANG Fei;HUANG Tian-yuan;WU Xue-mei;ZHUGE Lan-jian
. 2013, (
05
): 744 -747 .
