Fabrication of tilted-texture thin films for flexible atomic layer thermopile heat flux sensor
XIA Tao, ZHAO Ruipeng, CHEN Xi, LI Zhenzhe, TAO Bowan
Jorunal of Functional Materials . 2022, (9): 9018 -9024 .  DOI: 10.3969/j.issn.1001-9731.2022.09.004