Fabrication of tilted-texture thin films for flexible atomic layer thermopile heat flux sensor

doi:10.3969/j.issn.1001-9731.2022.09.004

Journal of Functional Materials ›› 2022, Vol. 53 ›› Issue (9) : 9018-9024. DOI: 10.3969/j.issn.1001-9731.2022.09.004

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Fabrication of tilted-texture thin films for flexible atomic layer thermopile heat flux sensor

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2022, 53(9): 9018-9024 https://doi.org/10.3969/j.issn.1001-9731.2022.09.004

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Received	Revised	Published
2022-03-15	2022-05-18	2022-09-30
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2022-09-30

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