Effect of substrate temperature on structural and physical properties of ZrN films by magnetron sputtering
GAO Jie, YAO Weizhen, YANG Shaoyan, WEI Jie, LI Chengming, WEI Hongyuan
Journal of Functional Materials . 2021, (9): 9148 -9153 .  DOI: 10.3969/j.issn.1001-9731.2021.09.024

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