Effect of substrate temperature on structural and physical properties of ZrN films by magnetron sputtering

doi:10.3969/j.issn.1001-9731.2021.09.024

Jorunal of Functional Materials ›› 2021, Vol. 52 ›› Issue (9) : 9148-9153. DOI: 10.3969/j.issn.1001-9731.2021.09.024

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Effect of substrate temperature on structural and physical properties of ZrN films by magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2021, 52(9): 9148-9153 https://doi.org/10.3969/j.issn.1001-9731.2021.09.024

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Received	Revised	Published
2021-03-19	2021-05-21	2021-09-30
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2021-09-30

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