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中文
Preparation of largescale smooth TiN thin film electrode with ultra low resistivity by magnetron sputtering
TIAN Zhongjie, SHI Shuyan, CHEN Qilei, RUI Xiangxin, HUANG Xinyu, SUN Nana, ZHOU Dayu
Journal of Functional Materials . 2021, (
7
): 7012 -7017 . DOI: 10.3969/j.issn.1001-9731.2021.07.003
