Effect of background vacuum on the morphology of higher manganese silicide prepared by magnetron sputtering
PAN Wangheng, ZHANG Jinmin, XIE Jie, FENG Lei, HE Teng, WANG Li, XIAO Qingquan, XIE Quan
Journal of Functional Materials . 2020, (8): 8183 -8188 .  DOI: 10.3969/j.issn.1001-9731.2020.08.029

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