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中文
Effect of substrates temperature on microstructure and conductivity of TiN electrode thin film prepared by DC reactive magnetron sputtering
ZHOU Fangyang, XU Jin, YANG Xirui, LIANG Hailong, ZHAO Peng, ZHOU Dayu
Journal of Functional Materials . 2017, (
8
): 8203 -8207 . DOI: 10.3969/j.issn.1001-9731.2017.08.036
