Effect of substrates temperature on microstructure and conductivity of TiN electrode thin film prepared by DC reactive magnetron sputtering

doi:10.3969/j.issn.1001-9731.2017.08.036

Jorunal of Functional Materials ›› 2017, Vol. 48 ›› Issue (8) : 8203-8207. DOI: 10.3969/j.issn.1001-9731.2017.08.036

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(8): 8203-8207 https://doi.org/10.3969/j.issn.1001-9731.2017.08.036

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2016-12-07	2017-08-30
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2017-08-30

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