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中文
Effects of trimethylaluminium pulse duration and purging time on the performance of Al
2
O
3
film by atomic layer deposition
LI Chunya, ZHANG Hao, SONG Jiantao, DING Xingwei, WEI Bin
Journal of Functional Materials . 2017, (
7
): 7178 -7181 . DOI: 10.3969/j.issn.1001-9731.2017.07.035
