Oxygen-vacancy formation and packaging technology of β-SiC/SiOxCy/Cfree nanocomposite films as heat dissipation substrate
YANG Min, MAO Yu, CHEN Fen, ZHOU Rui, LIAO Liang, CHEN Zeng, LIU Leyu, YAO Rongqian
Journal of Functional Materials . 2017, (6): 6199 -6202 .  DOI: 10.3969/j.issn.1001-9731.2017.06.036