Structure and electrical properties of titanium nitride thin films prepared by pulsed laser deposition at different pressures
LI Yuxiong, SUI Zhanpeng, GU Chengyan, CHEN Yigang, JIANG Chunping
Journal of Functional Materials . 2018, (6): 6196 -6200 .  DOI: 10.3969/j.issn.1001-9731.2018.06.033

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