Structure and electrical properties of titanium nitride thin films prepared by pulsed laser deposition at different pressures

doi:10.3969/j.issn.1001-9731.2018.06.033

Jorunal of Functional Materials ›› 2018, Vol. 49 ›› Issue (6) : 6196-6200. DOI: 10.3969/j.issn.1001-9731.2018.06.033

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2018, 49(6): 6196-6200 https://doi.org/10.3969/j.issn.1001-9731.2018.06.033

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2017-11-25	2018-06-30
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2018-06-30

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