Investigation of diamond like carbon thin film deposited by coupling DC/RF reactive magnetron sputtering
LIU Lei, WANG Tao, HE Zhibing, ZHANG Ling, YI Yong, DU Kai
Journal of Functional Materials . 2017, (1): 1209 -1214 .  DOI: 10.3969/j.issn.1001-9731.2017.01.038