Investigation of diamond like carbon thin film deposited by coupling DC/RF reactive magnetron sputtering

doi:10.3969/j.issn.1001-9731.2017.01.038

Journal of Functional Materials ›› 2017, Vol. 48 ›› Issue (1) : 1209-1214. DOI: 10.3969/j.issn.1001-9731.2017.01.038

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Investigation of diamond like carbon thin film deposited by coupling DC/RF reactive magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(1): 1209-1214 https://doi.org/10.3969/j.issn.1001-9731.2017.01.038

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2016-01-20	2017-01-30
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2017-01-30

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