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中文
Study on structure and properties of copper films deposited by DC pulsed magnetron sputtering
TAN Shuyong, ZHANG Xuhai, ZHU Di, CHEN Jian, JIANG Jianqing
Journal of Functional Materials . 2017, (
2
): 2144 -2148 . DOI: 10.3969/j.issn.1001-9731.2017.02.026
