Influence of Si content on microstructure and mechanical property of CrN/TiSiN nano-multilayered films
YUAN Qing, LI Wei, LIU Ping, ZHANG Ke, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua
Journal of Functional Materials . 2018, (1): 1044 -1048 .  DOI: 10.3969/j.issn.1001-9731.2018.01.009