Influence of Si content on microstructure and mechanical property of CrN/TiSiN nano-multilayered films

doi:10.3969/j.issn.1001-9731.2018.01.009

Journal of Functional Materials ›› 2018, Vol. 49 ›› Issue (1) : 1044-1048. DOI: 10.3969/j.issn.1001-9731.2018.01.009

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Influence of Si content on microstructure and mechanical property of CrN/TiSiN nano-multilayered films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2018, 49(1): 1044-1048 https://doi.org/10.3969/j.issn.1001-9731.2018.01.009

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2017-06-21	2018-01-30
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2018-01-30

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