Study on the effect of substrate negative bias voltage on the properties of C∶TiO2 thin films prepared by reaction sputtering using CO2 gas
YUE Tianfeng, LIU Jiaqi, WEN Feng, MA Yanping, DING Chunhua, JIANG Hong
Journal of Functional Materials . 2019, (6): 6088 -6094 .  DOI: 10.3969/j.issn.1001-9731.2019.06.016

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