Study on the effect of substrate negative bias voltage on the properties of C∶TiO<sub>2</sub> thin films prepared by reaction sputtering using CO<sub>2</sub> gas

doi:10.3969/j.issn.1001-9731.2019.06.016

Jorunal of Functional Materials ›› 2019, Vol. 50 ›› Issue (6) : 6088-6094. DOI: 10.3969/j.issn.1001-9731.2019.06.016

Study on the effect of substrate negative bias voltage on the properties of C∶TiO₂ thin films prepared by reaction sputtering using CO₂ gas

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2019, 50(6): 6088-6094 https://doi.org/10.3969/j.issn.1001-9731.2019.06.016

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2019-03-10	2019-06-30
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2019-06-28

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