(AlCrTiZrNb)N/Si<sub>3</sub>N<sub>4</sub>纳米多层膜的微观结构和力学性能研究

ZHAI Qingqing, LI Wei, LIU Ping, ZHANG Ke, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua

Journal of Functional Materials . 2019, (4): 4142 -4147 . DOI: 10.3969/j.issn.1001-9731.2019.04.024