Study on microstructure and mechanical properties of (AlCrTiZrNb)N/Si<sub>3</sub>N<sub>4</sub> nano-multilayer films

doi:10.3969/j.issn.1001-9731.2019.04.024

Jorunal of Functional Materials ›› 2019, Vol. 50 ›› Issue (4) : 4142-4147. DOI: 10.3969/j.issn.1001-9731.2019.04.024

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Study on microstructure and mechanical properties of (AlCrTiZrNb)N/Si₃N₄ nano-multilayer films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2019, 50(4): 4142-4147 https://doi.org/10.3969/j.issn.1001-9731.2019.04.024

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2019-01-05	2019-04-30
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2019-04-30

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