Preparation research of ZnO thin films by RF magnetron sputtering
AI Chunpeng, ZHAO Xiaofeng, BAI Yinan, FENG Qingmao, WEN Dianzhong
功能材料 . 2016, (S2): 81 -84 .  DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅱ).015

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