Preparation research of ZnO thin films by RF magnetron sputtering

doi:10.3969/j.issn.1001-9731.2016.增刊(Ⅱ).015

Jorunal of Functional Materials ›› 2016, Vol. 47 ›› Issue (S2) : 81-84. DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅱ).015

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Preparation research of ZnO thin films by RF magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(S2): 81-84 https://doi.org/10.3969/j.issn.1001-9731.2016.增刊(Ⅱ).015

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2016-07-14	2016-12-20
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2016-12-20

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