Study on the correlation between surface energy andtribological property of silicon-nitride films
SHI Zhifeng,HUANG Nan,WANG Lin,NING Chengyun,WANG Yingjun
功能材料 . 2016, (12): 12001 -12006 .  DOI: 10.3969/j.issn.1001-9731.2016.12.001

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