Study on the correlation between surface energy andtribological property of silicon-nitride films

doi:10.3969/j.issn.1001-9731.2016.12.001

Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (12) : 12001-12006. DOI: 10.3969/j.issn.1001-9731.2016.12.001

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Study on the correlation between surface energy andtribological property of silicon-nitride films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(12): 12001-12006 https://doi.org/10.3969/j.issn.1001-9731.2016.12.001

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Received	Published
2016-04-03	2016-12-30
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2016-12-30

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