Study on simulation of radiation damage of the charged particles implanted silicon
ZHENG Xianli,LIU Min,XIA Yanfang,CHENG Pinjing,ZHANG Boli
功能材料 . 2016, (S1): 164 -168 .  DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅰ).029

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