Study on simulation of radiation damage of the charged particles implanted silicon

doi:10.3969/j.issn.1001-9731.2016.增刊(Ⅰ).029

Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (S1) : 164-168. DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅰ).029

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Study on simulation of radiation damage of the charged particles implanted silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(S1): 164-168 https://doi.org/10.3969/j.issn.1001-9731.2016.增刊(Ⅰ).029

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2015-10-05	2016-11-20
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2016-11-20

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