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中文
Study of FA/OⅡ chelating agent on BTA removal in post-CMP cleaning
DENG Haiwen, TAN Baimei, ZHANG Yan, GAO Baohong, WANG Chenwei, GU Zhangbing
功能材料 . 2016, (
6
): 6205 -6208 . DOI: 10.3969/j.issn.1001-9731.2016.06.038
