Study of FA/OⅡ chelating agent on BTA removal in post-CMP cleaning

doi:10.3969/j.issn.1001-9731.2016.06.038

Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (6) : 6205-6208. DOI: 10.3969/j.issn.1001-9731.2016.06.038

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Study of FA/OⅡ chelating agent on BTA removal in post-CMP cleaning

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(6): 6205-6208 https://doi.org/10.3969/j.issn.1001-9731.2016.06.038

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2015-06-09	2016-06-30
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2016-06-30

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