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中文
Deformation and fracture behavior of SiN
x
coating under nanoindentation test
AN Tao, DENG Xiaofang, WANG Lili, SONG Lijun
功能材料 . 2016, (
10
): 10235 -10238 . DOI: 10.3969/j.issn.1001-9731.2016.10.044
