Study on microstructure and mechanical properties of ZrN/TiSiN nanomultilayered films
ZHENG Wei, LI Wei, MENG Jia, LIU Ping, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua
功能材料 . 2016, (1): 1038 -1042 .  DOI: 10.3969/j.issn.1001-9731.2016.01.008