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中文
Influenec of process gas ratio on the properties of alumina film deposited by microwave mocvd thchnology
ZHANG Jian, BA Dechun, ZHAO Chongling,DU Guangyu,LIU Kun
功能材料 . 2016, (
5
): 227 -230 . DOI: 10.3969/j.issn.1001-9731.2016.05.043
