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中文
Microstructure and Thermal Stability of an Ultrathin α-Ta(N)/TaN Bi-layer Diffusion Barrier
LIU Chun-Hai;CUI Xue-jun;JIN Yong-zhong;YANG Rui-song;WANG Su-juan;YE Song
. 2013, (
02
): 202 -205 .
