Effects of Sputtering Power on Al Doped ZnO Thin Films Deposited by RF Magnetron Sputtering

Effects of Sputtering Power on Al Doped ZnO Thin Films Deposited by RF Magnetron Sputtering

;Yu -Ying ZHENG

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (08) : 6-0.

Effects of Sputtering Power on Al Doped ZnO Thin Films Deposited by RF Magnetron Sputtering

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