Characterization of microstructure and mechanical property of TiSiCN nanocomposite film deposited by RF magnetron sputtering

Characterization of microstructure and mechanical property of TiSiCN nanocomposite film deposited by RF magnetron sputtering

;Wei LI

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (07) : 16-0.

Characterization of microstructure and mechanical property of TiSiCN nanocomposite film deposited by RF magnetron sputtering

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