Optimization and Operation Mechanism Analysis of Cz-Si Wafer Passivation by α-SiOx:H Film

Optimization and Operation Mechanism Analysis of Cz-Si Wafer Passivation by α-SiOx:H Film

Hai-bin ZHANG ;;;;;

Journal of Functional Materials ›› 2014, Vol. 45 ›› Issue (09) : 16-0.

Optimization and Operation Mechanism Analysis of Cz-Si Wafer Passivation by α-SiOx:H Film

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