Effect of Substrate temperature on the Structure and Optical Properties of the Ta2O5 thin film

Effect of Substrate temperature on the Structure and Optical Properties of the Ta2O5 thin film

;;;;Chaoyong Deng

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (23) : 15-0.

Effect of Substrate temperature on the Structure and Optical Properties of the Ta2O5 thin film

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