Process parameters optimization for TiN/AlN multilayer films fabricated by pulsed laser deposition via SVR

Process parameters optimization for TiN/AlN multilayer films fabricated by pulsed laser deposition via SVR

Si-Jie HUANG;Cong-Zhong CAIQing-Wen ZENG

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (14) : 2074-2078.

Process parameters optimization for TiN/AlN multilayer films fabricated by pulsed laser deposition via SVR

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