Investigation of the doping properties of ZnO:H thin film prepared by RF magnetron sputtering

Investigation of the doping properties of ZnO:H thin film prepared by RF magnetron sputtering

CHEN Yi-chuan;HU Yue-hui;CHEN Jun;CHEN Xin-hua;MA De-fu

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Jorunal of Functional Materials ›› 2013, Vol. 44 ›› Issue (10) : 1497-1501.

工艺 ·技术

Investigation of the doping properties of ZnO:H thin film prepared by RF magnetron sputtering

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