Thermal evaporation method of semiconducting Mg2Si films

Thermal evaporation method of semiconducting Mg2Si films

YU Hong;XIE Quan;XIAO Qing-quan;CHEN Qian

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Journal of Functional Materials ›› 2013, Vol. 44 ›› Issue (08) : 1204-1207.

工艺 ·技术

Thermal evaporation method of semiconducting Mg2Si films

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