Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

SHAO Honghong;XU Tao;WANG Xiaojing

PDF(3216 KB)

Jorunal of Functional Materials ›› 2012, Vol. 43 ›› Issue (15) : 2095-2097.

研究与开发

Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2012, 43(15): 2095-2097

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(3216 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉