Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

SHAO Honghong;XU Tao;WANG Xiaojing

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (15) : 2095-2097.

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Research on Oxidation Property of Mo-Si Thin Filmby Magnetron Sputtering

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