Thermal stability and optical properties of HfTaO films prepared by reactive RF magnetron sputtering?

Thermal stability and optical properties of HfTaO films prepared by reactive RF magnetron sputtering?

Chun-Yu MA ;;;Qingyu zhang

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (10) : 32-0.

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Thermal stability and optical properties of HfTaO films prepared by reactive RF magnetron sputtering?

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