Study of the small and dense Ge nanodots deposited on vicinal Si (001) substrate by ion-beam sputtering

Study of the small and dense Ge nanodots deposited on vicinal Si (001) substrate by ion-beam sputtering

;;;Yu YANG

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Jorunal of Functional Materials ›› 2012, Vol. 43 ›› Issue (10) : 27-0.

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Study of the small and dense Ge nanodots deposited on vicinal Si (001) substrate by ion-beam sputtering

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