Study of Characteristics of Photolithography medium with Sub-wavelength Resolution

Study of Characteristics of Photolithography medium with Sub-wavelength Resolution

Xiang-Xian WANG;Hong-Fei Shi;Dou-Guo Zhang;Hai Ming

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (09) : 1177-1180.

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Study of Characteristics of Photolithography medium with Sub-wavelength Resolution

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