Deposition Parameters of RF Sputtered High-Quality ZnO films

Deposition Parameters of RF Sputtered High-Quality ZnO films

Huo-Quan Li;Xiang-Hua Zeng;Jiu-Rong Han

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Journal of Functional Materials ›› 2012, Vol. 43 ›› Issue (05) : 677-680.

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Deposition Parameters of RF Sputtered High-Quality ZnO films

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