Effect of nano-Si02 slurry on low-k material (PI)

Effect of nano-Si02 slurry on low-k material (PI)

HU Yi;LIU Yuling;LIU Xiaoyan

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (S5) : 852-854.

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Effect of nano-Si02 slurry on low-k material (PI)

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