The study of Fabrication of three-dimensional micro-electrode structure for MEMS super capacitor by SU-8 photoresist

The study of Fabrication of three-dimensional micro-electrode structure for MEMS super capacitor by SU-8 photoresist

WEN Chunming;YOU Zheng;WEN Zhiyu

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (S3) : 681-684.

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The study of Fabrication of three-dimensional micro-electrode structure for MEMS super capacitor by SU-8 photoresist

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