Effect of the Monomer TEOS Flow Rate on the Formation of Silicon Dioxide Films by Nonequilibrium, Atmospheric Pressure Plasma Jet

Effect of the Monomer TEOS Flow Rate on the Formation of Silicon Dioxide Films by Nonequilibrium, Atmospheric Pressure Plasma Jet

Jiang LIN ;

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (S2) : 48-0.

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Effect of the Monomer TEOS Flow Rate on the Formation of Silicon Dioxide Films by Nonequilibrium, Atmospheric Pressure Plasma Jet

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