Deposition of polycrystalline diamond films by a new type MPCVD reactor at high power density

Deposition of polycrystalline diamond films by a new type MPCVD reactor at high power density

YU Shengwang;LI Xiaojing;ZHANG Sikai

Jorunal of Functional Materials ›› 2011, Vol. 42 ›› Issue (09) : 1722-1726.

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Deposition of polycrystalline diamond films by a new type MPCVD reactor at high power density

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